Structural Features
◆ Metal membrane sealing improves product cleanliness and leakage rate
◆ Internal electrolytic polishing roughness of the flow channel: EP: Ra 5 μin BA: Ra 10μin
◆ Mother thread: 1/4 "VCR connector
◆ Internal volume: 0.49in ³ filename
◆ * High flow: Standard: 30 SLPM, High flow HF: 120 SLPM
◆ Design verification pressure: 150% of the large fixed pressure
◆ Design explosion pressure: * 300% of the large fixed pressure
◆ 100% factory helium testing
Product Application
◆ Corrosive and special gases
◆ Semiconductor industry
◆ Research laboratory
◆ Chemical industry
Technical Specifications
◆ Mother: SS316L ，SS316L VIN/VAR ，Hastelloy ® C22
◆ Valve seat: PCTFE，Vespel ®
◆ Diaphragm: SS316L，Hastelloy ® C22 alloy
◆ Inlet pressure: 300, 3500psig
Exhaust pressure: 10, 15, 25, 50, 100, 150psig
◆ Working temperature: PCTFE：- 10 ℃ to 80 ℃ (14 ℉ to 176 ℉)
Vespel ®：- 26 ℃ to 177 ℃ (15 ℉ to 350 ℉)
Leakage rate:
Internal leakage 2x10-10 sccm He
External leakage 2x10-9 sccs He
◆ Traffic parameters: Cv =0. 09 HF Cv=0.15
